| Plasma electronics: applications in microelectronic device fabrication T Makabe, ZL Petrovic CRC Press, 2006 | 554 | 2006 |
| Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma T Kitajima, Y Takeo, ZL Petrović, T Makabe Applied Physics Letters 77 (4), 489-491, 2000 | 272 | 2000 |
| Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHz T Makabe, N Nakano, Y Yamaguchi Physical Review A 45 (4), 2520, 1992 | 167 | 1992 |
| Simulations of rf glow discharges in SF 6 by the relaxation continuum model: Physical structure and function of the narrow-gap reactive-ion etcher N Nakano, N Shimura, ZL Petrović, T Makabe Physical Review E 49 (5), 4455, 1994 | 144 | 1994 |
| Transport coefficients and scattering cross-sections for plasma modelling in CF4-Ar mixtures: a swarm analysis M Kurihara, ZL Petrovic, T Makabe Journal of Physics D: Applied Physics 33 (17), 2146, 2000 | 139 | 2000 |
| The effect of topographical local charging on the etching of deep-submicron structures in as a function of aspect ratio J Matsui, N Nakano, ZL Petrović, T Makabe Applied Physics Letters 78 (7), 883-885, 2001 | 107 | 2001 |
| Kinetic phenomena in electron transport in radio-frequency fields ZL Petrović, ZM Raspopović, S Dujko, T Makabe Applied surface science 192 (1-4), 1-25, 2002 | 103 | 2002 |
| Effect of O2(a1Δg) on plasma structures in oxygen radio frequency discharges M Shibata, N Nakano, T Makabe Journal of applied physics 80 (11), 6142-6147, 1996 | 102 | 1996 |
| Study of the structure in rf glow discharges in SiH4/H2 by spatiotemporal optical emission spectroscopy: Influence of negative ions F Tochikubo, A Suzuki, S Kakuta, Y Terazono, T Makabe Journal of applied physics 68 (11), 5532-5539, 1990 | 93 | 1990 |
| Modeling of a rf glow discharge plasma K Okazaki, T Makabe, Y Yamaguchi Applied physics letters 54 (18), 1742-1744, 1989 | 93 | 1989 |
| Spatiotemporal optical emission spectroscopy of rf discharges in SF6 ZL Petrović, F Tochikubo, S Kakuta, T Makabe Journal of applied physics 73 (5), 2163-2172, 1993 | 92 | 1993 |
| Functional design of a pulsed two-frequency capacitively coupled plasma in for etching K Maeshige, G Washio, T Yagisawa, T Makabe Journal of applied physics 91 (12), 9494-9501, 2002 | 85 | 2002 |
| Two-dimensional CT images of two-frequency capacitively coupled plasma T Kitajima, Y Takeo, T Makabe Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17 (5 …, 1999 | 83 | 1999 |
| Diffusion tensor in electron transport in gases in a radio-frequency field K Maeda, T Makabe, N Nakano, S Bzenic-acute, ZL Petrovic-acute Physical Review E 55 (5), 5901, 1997 | 82 | 1997 |
| O2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing M Shibata, N Nakano, T Makabe Journal of applied physics 77 (12), 6181-6187, 1995 | 81 | 1995 |
| Two-dimensional self-consistent simulation of a DC magnetron discharge E Shidoji, H Ohtake, N Nakano, T Makabe Japanese journal of applied physics 38 (4R), 2131, 1999 | 80 | 1999 |
| Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy F Tochikubo, T Kokubo, S Kakuta, A Suzuki, T Makabe Journal of Physics D: Applied Physics 23 (9), 1184, 1990 | 79 | 1990 |
| Functional separation in two frequency operation of an inductively coupled plasma T Denda, Y Miyoshi, Y Komukai, T Goto, ZL Petrović, T Makabe Journal of applied physics 95 (3), 870-876, 2004 | 78 | 2004 |
| Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar M Tadokoro, H Hirata, N Nakano, ZL Petrović, T Makabe Physical Review E 58 (6), 7823, 1998 | 77 | 1998 |
| Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies ZL Petrović, ZM Raspopović, VD Stojanović, JV Jovanović, G Malović, ... Applied surface science 253 (16), 6619-6640, 2007 | 75 | 2007 |
