Yuki Shimizu
Yuki Shimizu
Department of Finemechanics, Tohoku University
確認したメール アドレス: nano.mech.tohoku.ac.jp - ホームページ
A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage
X Li, W Gao, H Muto, Y Shimizu, S Ito, S Dian
Precision Engineering 37 (3), 771-781, 2013
A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement
A Kimura, W Gao, WJ Kim, K Hosono, Y Shimizu, L Shi, L Zeng
Precision engineering 36 (4), 576-585, 2012
A three-axis autocollimator for detection of angular error motions of a precision stage
W Gao, Y Saito, H Muto, Y Arai, Y Shimizu
CIRP annals 60 (1), 515-518, 2011
Design and construction of the motion mechanism of an XY micro-stage for precision positioning
Y Shimizu, Y Peng, J Kaneko, T Azuma, S Ito, W Gao, TF Lu
Sensors and Actuators A: Physical 201, 395-406, 2013
Contact/clearance sensor for HDI subnanometer regime
J Xu, Y Shimizu, M Furukawa, J Li, Y Sano, T Shiramatsu, Y Aoki, ...
IEEE Transactions on Magnetics 50 (3), 114-118, 2014
Nano-scale defect mapping on a magnetic disk surface using a contact sensor
Y Shimizu, J Xu, H Kohira, M Kurita, T Shiramatsu, M Furukawa
IEEE Transactions on Magnetics 47 (10), 3426-3432, 2011
A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings
X Li, W Gao, Y Shimizu, S Ito
CIRP Annals 63 (1), 461-464, 2014
Magnetic-recording head with first thermal fly-height control element and embedded contact sensor element configurable as second thermal fly-height control element
M Kurita, T Shiramatsu, K Kuroki, Y Shimizu
US Patent 8,773,801, 2014
Dynamically controlled thermal flying-height control slider
T Shiramatsu, T Atsumi, M Kurita, Y Shimizu, H Tanaka
IEEE Transactions on Magnetics 44 (11), 3695-3697, 2008
An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor
YL Chen, S Wang, Y Shimizu, S Ito, W Gao, BF Ju
Precision Engineering 39, 134-142, 2015
Contact detection between a disk and magnetic head
M Kurita, T Shiramatsu, Y Shimizu
US Patent 8,711,508, 2014
Fabrication of large-size SiC mirror with precision aspheric profile for artificial satellite
Y Shimizu, S Goto, JC Lee, S Ito, W Gao, S Adachi, K Omiya, H Sato, ...
Precision Engineering 37 (3), 640-649, 2013
Experimental study on slider dynamics during touchdown by using thermal flying-height control
Y Shimizu, J Xu, H Kohira, K Kuroki, K Ono
Microsystem technologies 17 (5-7), 897-902, 2011
Performance of sliders flying over discrete-track media
J Li, J Xu, Y Shimizu
Journal of Tribology 129 (4), 712-719, 2007
Controlling head flying height in a data storage device
Y Shimizu, H Tanaka, M Tokuyama, J Xu
US Patent 7,271,975, 2007
Noise and particle shield for contact sensor in a slider
M Furukawa, Y Shimizu, J Xu, Y Maruyama, T Ohtsu, T Shiramatsu
US Patent 8,477,455, 2013
Design and evaluation of damped air bearings at head-disk interface
J Li, J Xu, Y Shimizu, M Honchi, K Ono, Y Kato
Journal of Tribology 132 (3), 031702, 2010
Scratch-induced demagnetization of perpendicular magnetic disk
M Furukawa, J Xu, Y Shimizu, Y Kato
IEEE Transactions on Magnetics 44 (11), 3633-3636, 2008
Drive level measurement of flying height modulation and control of slider disk contact
J Xu, Y Shimizu, L Su
STLE/ASME 2006 International Joint Tribology Conference, 869-873, 2006
Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions
Y Shimizu, SL Tan, D Murata, T Maruyama, S Ito, YL Chen, W Gao
Optics Express 24 (3), 2788-2805, 2016
論文 1–20