| Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry YS Ghim, SW Kim Optics express 14 (24), 11885-11891, 2006 | 109 | 2006 |
| Fast, precise, tomographic measurements of thin films YS Ghim, SW Kim Applied physics letters 91 (9), 2007 | 69 | 2007 |
| 3D surface mapping of freeform optics using wavelength scanning lateral shearing interferometry YS Ghim, HG Rhee, A Davies, HS Yang, YW Lee Optics express 22 (5), 5098-5105, 2014 | 55 | 2014 |
| Spectrally resolved white-light interferometry for 3D inspection of a thin-film layer structure YS Ghim, SW Kim Applied optics 48 (4), 799-803, 2009 | 52 | 2009 |
| Complete fringe order determination in scanning white-light interferometry using a Fourier-based technique YS Ghim, A Davies Applied Optics 51 (12), 1922-1928, 2012 | 49 | 2012 |
| Thin-film thickness profile measurement using a Mirau-type low-coherence interferometer YS Ghim, HG Rhee, HS Yang, YW Lee Measurement Science and Technology 24 (7), 075002, 2013 | 39 | 2013 |
| Reflectometry-based wavelength scanning interferometry for thickness measurements of very thin wafers YS Ghim, A Suratkar, A Davies Optics express 18 (7), 6522-6529, 2010 | 39 | 2010 |
| Single-shot deflectometry for dynamic 3D surface profile measurement by modified spatial-carrier frequency phase-shifting method MT Nguyen, YS Ghim, HG Rhee Scientific Reports 9 (1), 3157, 2019 | 37 | 2019 |
| Application of the random ball test for calibrating slope-dependent errors in profilometry measurements Y Zhou, YS Ghim, A Fard, A Davies Applied optics 52 (24), 5925-5931, 2013 | 28 | 2013 |
| Instantaneous thickness measurement of multilayer films by single-shot angle-resolved spectral reflectometry YS Ghim, HG Rhee Optics letters 44 (22), 5418-5421, 2019 | 25 | 2019 |
| Touch probe tip compensation using a novel transformation algorithm for coordinate measurements of curved surfaces HK Ahn, H Kang, YS Ghim, HS Yang International journal of precision engineering and manufacturing 20, 193-199, 2019 | 22 | 2019 |
| Simultaneous measurements of top surface and its underlying film surfaces in multilayer film structure YS Ghim, HG Rhee, A Davies Scientific reports 7 (1), 11843, 2017 | 21 | 2017 |
| Micro-optic reflection and transmission interferometer for complete microlens characterization V Gomez, YS Ghim, H Ottevaere, N Gardner, B Bergner, K Medicus, ... Measurement Science and Technology 20 (2), 025901, 2009 | 21 | 2009 |
| Single-shot freeform surface profiler YB Seo, HB Jeong, HG Rhee, YS Ghim, KN Joo Optics Express 28 (3), 3401-3409, 2020 | 20 | 2020 |
| Apparatus and method for measuring thickness and profile of transparent thin film using white-light interferometer SW Kim, YS Ghim US Patent 7,483,147, 2009 | 20 | 2009 |
| Correction of rotational inaccuracy in lateral shearing interferometry for freeform measurement HG Rhee, YS Ghim, J Lee, HS Yang, YW Lee Optics Express 21 (21), 24799-24808, 2013 | 17 | 2013 |
| Improved wavefront reconstruction algorithm from slope measurements PH Phuc, NT Manh, HG Rhee, YS Ghim, HS Yang, YW Lee Journal of the Korean Physical Society 70, 469-474, 2017 | 13 | 2017 |
| Ultra-precision surface polishing using ion beam figuring YS Ghim, SJ You, HG Rhee, HS Yang, YW Lee 6th International Symposium on Advanced Optical Manufacturing and Testing …, 2012 | 13 | 2012 |
| Real-time 3D measurement of freeform surfaces by dynamic deflectometry based on diagonal spatial carrier-frequency pattern projection MT Nguyen, J Lee, YS Ghim, HG Rhee Measurement 200, 111684, 2022 | 12 | 2022 |
| Nonlinearity response correction in phase-shifting deflectometry P Kang, YS Ghim, HG Rhee Measurement Science and Technology 29 (4), 045012, 2018 | 12 | 2018 |
