Wei Gao
Wei Gao
Tohoku University, Precision Nanometrology Lab
確認したメール アドレス: cc.mech.tohoku.ac.jp - ホームページ
Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder
W Gao, T Araki, S Kiyono, Y Okazaki, M Yamanaka
Precision Engineering 27 (3), 289-298, 2003
Measurement technologies for precision positioning
W Gao, SW Kim, H Bosse, H Haitjema, YL Chen, XD Lu, W Knapp, ...
CIRP Annals 64 (2), 773-796, 2015
A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning
W Gao, S Dejima, H Yanai, K Katakura, S Kiyono, Y Tomita
Precision Engineering 28 (3), 329-337, 2004
Ductile regime nanomachining of single-crystal silicon carbide
J Patten, W Gao, K Yasuto
Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage
W Gao, Y Arai, A Shibuya, S Kiyono, CH Park
Precision engineering 30 (1), 96-103, 2006
Precision nanometrology: sensors and measuring systems for nanomanufacturing
W Gao
Springer Science & Business Media, 2010
Precision measurement of cylinder straightness using a scanning multi-probe system
W Gao, J Yokoyama, H Kojima, S Kiyono
Precision Engineering 26 (3), 279-288, 2002
A new multiprobe method of roundness measurements
W Gao, S Kiyono, T Nomura
Precision engineering 19 (1), 37-45, 1996
A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage
X Li, W Gao, H Muto, Y Shimizu, S Ito, S Dian
Precision engineering 37 (3), 771-781, 2013
A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers
W Gao, PS Huang, T Yamada, S Kiyono
Precision Engineering 26 (4), 396-404, 2002
High accuracy profile measurement of a machined surface by the combined method
W Gao, S Kiyono
Measurement 19 (1), 55-64, 1996
Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness
A Kimura, W Gao, Y Arai, Z Lijiang
Precision Engineering 34 (1), 145-155, 2010
High-accuracy roundness measurement by a new error separation method
W Gao, S Kiyono, T Sugawara
Precision engineering 21 (2-3), 123-133, 1997
Construction and testing of a nanomachining instrument
W Gao, RJ Hocken, JA Patten, J Lovingood, DA Lucca
Precision Engineering 24 (4), 320-328, 2000
Stage device
W Gao, S Kiyono, Y Tomita, M Tano
US Patent 7,257,902, 2007
A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement
A Kimura, W Gao, WJ Kim, K Hosono, Y Shimizu, L Shi, L Zeng
Precision engineering 36 (4), 576-585, 2012
Profile measurement of machined surface with a new differential method
S Kiyono, W Gao
Precision Engineering 16 (3), 212-218, 1994
A three-axis displacement sensor with nanometric resolution
W Gao, A Kimura
CIRP annals 56 (1), 529-532, 2007
Precision measurement of two-axis positions and tilt motions using a surface encoder
W Gao, S Dejima, Y Shimizu, S Kiyono, H Yoshikawa
CIRP Annals 52 (1), 435-438, 2003
On-machine profile measurement of machined surface using the combined three-point method
W Gao, S Kiyono
JSME International Journal Series C Mechanical Systems, Machine Elements and …, 1997
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