フォロー
Wei Gao
Wei Gao
Tohoku University, Precision Nanometrology Lab
確認したメール アドレス: cc.mech.tohoku.ac.jp - ホームページ
タイトル
引用先
引用先
Measurement technologies for precision positioning
W Gao, SW Kim, H Bosse, H Haitjema, YL Chen, XD Lu, W Knapp, ...
CIRP annals 64 (2), 773-796, 2015
5202015
Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder
W Gao, T Araki, S Kiyono, Y Okazaki, M Yamanaka
Precision Engineering 27 (3), 289-298, 2003
3842003
On-machine and in-process surface metrology for precision manufacturing
W Gao, H Haitjema, FZ Fang, RK Leach, CF Cheung, E Savio, JM Linares
Cirp Annals 68 (2), 843-866, 2019
3422019
A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning
W Gao, S Dejima, H Yanai, K Katakura, S Kiyono, Y Tomita
Precision Engineering 28 (3), 329-337, 2004
2272004
Ductile regime nanomachining of single-crystal silicon carbide
J Patten, W Gao, K Yasuto
2152005
A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage
X Li, W Gao, H Muto, Y Shimizu, S Ito, S Dian
Precision Engineering 37 (3), 771-781, 2013
1822013
Precision nanometrology: sensors and measuring systems for nanomanufacturing
W Gao
Springer, 2010
1822010
Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage
W Gao, Y Arai, A Shibuya, S Kiyono, CH Park
Precision engineering 30 (1), 96-103, 2006
1752006
Precision measurement of cylinder straightness using a scanning multi-probe system
W Gao, J Yokoyama, H Kojima, S Kiyono
Precision Engineering 26 (3), 279-288, 2002
1462002
Nanomanufacturing—perspective and applications
FZ Fang, XD Zhang, W Gao, YB Guo, G Byrne, HN Hansen
CIRP Annals 66 (2), 683-705, 2017
1392017
A new multiprobe method of roundness measurements
W Gao, S Kiyono, T Nomura
Precision engineering 19 (1), 37-45, 1996
1381996
A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement
A Kimura, W Gao, WJ Kim, K Hosono, Y Shimizu, L Shi, L Zeng
Precision engineering 36 (4), 576-585, 2012
1372012
Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness
A Kimura, W Gao, Y Arai, Z Lijiang
Precision Engineering 34 (1), 145-155, 2010
1162010
A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers
W Gao, PS Huang, T Yamada, S Kiyono
Precision Engineering 26 (4), 396-404, 2002
1132002
High accuracy profile measurement of a machined surface by the combined method
W Gao, S Kiyono
Measurement 19 (1), 55-64, 1996
1111996
A three-axis autocollimator for detection of angular error motions of a precision stage
W Gao, Y Saito, H Muto, Y Arai, Y Shimizu
CIRP annals 60 (1), 515-518, 2011
1082011
A three-axis displacement sensor with nanometric resolution
W Gao, A Kimura
CIRP annals 56 (1), 529-532, 2007
1052007
High-accuracy roundness measurement by a new error separation method
W Gao, S Kiyono, T Sugawara
Precision engineering 21 (2-3), 123-133, 1997
1051997
Stage device
W Gao, S Kiyono, Y Tomita, M Tano
US Patent 7,257,902, 2007
952007
Measurement and compensation of error motions of a diamond turning machine
W Gao, M Tano, T Araki, S Kiyono, CH Park
Precision engineering 31 (3), 310-316, 2007
932007
現在システムで処理を実行できません。しばらくしてからもう一度お試しください。
論文 1–20