Paul Muralt

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Andrei KholkinUniversity of Aveiro確認したメールアドレス: ua.pt
Dimos PoulikakosETH Zurich確認したメールアドレス: ethz.ch
Nachi ChidambaramApple Inc.確認したメールアドレス: apple.com
Ludwig J. GaucklerETH Zürich確認したメールアドレス: mat.ethz.ch
Enrico CollaInstitute of Materials, EPFL, Lausanne確認したメールアドレス: infoprint.ch
Dong Su（苏东）Institute of Physics, CAS; Past: Brookhaven National Laboratory；Stony Brook Univ.; ASU; EPFL確認したメールアドレス: iphy.ac.cn
Guochu DengAustralian Centre for Neutron Scattering, Australian Nuclear Science and Technology Organization確認したメールアドレス: ansto.gov.au
Susan Trolier-McKinstrySteward S. Flaschen Professor of Ceramic Science and Engineering and Electrical Eng., Penn State確認したメールアドレス: psu.edu
Dragan DamjanovicEcole polytechnique fédérale de Lausanne / EPFL - Swiss Federal Institute of Technology in Lausanne確認したメールアドレス: epfl.ch
Jennifer RuppProfessor TU Munich & Visiting Professor MIT確認したメールアドレス: tum.de
giacomo benvenuti3D-oxides and ABCD Technology確認したメールアドレス: abcd-technology.com
Seungbum HongKorea Advanced Institute of Science and Technology (KAIST)確認したメールアドレス: kaist.ac.kr
Nico Hotz確認したメールアドレス: duke.edu
Alex DommannUniversität Bern確認したメールアドレス: unibe.ch
Simon RushworthEpiValence, Epichem, SAFC Hitech, Tyndall R&D projects確認したメールアドレス: tiscali.co.uk
Ali DabirianIPM確認したメールアドレス: ipm.ir
Juergen BruggerProfessor of Microengineering (EPFL)確認したメールアドレス: epfl.ch
Utku BaranCaltech, University of Washington, Koc University確認したメールアドレス: caltech.edu
HAKAN UREYProfessor at Koc University, Istanbul, TURKEY確認したメールアドレス: ku.edu.tr
Sven HolmstromVSY Biotechnology確認したメールアドレス: vsybiotechnology.com

フォロー

Paul Muralt

Professor in Materials Science, EPFL, Lausanne, Switzerland

確認したメールアドレス: epfl.ch - ホームページ

micro and nano systems piezoelectricity thin films


タイトル引用回数順公開年順タイトル順	引用先引用先	年
Thin film piezoelectrics for MEMS S Trolier-McKinstry, P Muralt Journal of Electroceramics 12, 7-17, 2004	1262	2004
Ferroelectric thin films for micro-sensors and actuators: a review P Muralt Journal of micromechanics and microengineering 10 (2), 136, 2000	1133	2000
Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications MA Dubois, P Muralt Applied Physics Letters 74 (20), 3032-3034, 1999	584	1999
PZT thin films for microsensors and actuators: Where do we stand? P Muralt IEEE transactions on ultrasonics, ferroelectrics, and frequency control 47 …, 2000	462	2000
{1 0 0}-Textured, piezoelectric Pb (Zrx, Ti1− x) O3 thin films for MEMS: integration, deposition and properties N Ledermann, P Muralt, J Baborowski, S Gentil, K Mukati, M Cantoni, ... Sensors and Actuators A: Physical 105 (2), 162-170, 2003	438	2003
Recent progress in materials issues for piezoelectric MEMS P Muralt Journal of the American Ceramic Society 91 (5), 1385-1396, 2008	422	2008
Micromachined infrared detectors based on pyroelectric thin films P Muralt Reports on progress in physics 64 (10), 1339, 2001	405	2001
Piezoelectric thin films for sensors, actuators, and energy harvesting P Muralt, RG Polcawich, S Trolier-McKinstry MRS bulletin 34 (9), 658-664, 2009	393	2009
Piezoelectric micromachined ultrasonic transducers based on PZT thin films P Muralt, N Ledermann, J Paborowski, A Barzegar, S Gentil, B Belgacem, ... IEEE transactions on ultrasonics, ferroelectrics, and frequency control 52 …, 2005	381	2005
Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering MA Dubois, P Muralt Journal of Applied Physics 89 (11), 6389-6395, 2001	375	2001
Thickness dependence of the properties of highly c-axis textured AlN thin films F Martin, P Muralt, MA Dubois, A Pezous Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (2 …, 2004	369	2004
Measurement of the effective transverse piezoelectric coefficient e31, f of AlN and Pb (Zrx, Ti1− x) O3 thin films MA Dubois, P Muralt Sensors and Actuators A: Physical 77 (2), 106-112, 1999	339	1999
Texture control of and thin films with seeding P Muralt, T Maeder, L Sagalowicz, S Hiboux, S Scalese, D Naumovic, ... Journal of Applied Physics 83 (7), 3835-3841, 1998	330	1998
Scanning tunneling potentiometry P Muralt, DW Pohl Applied Physics Letters 48 (8), 514-516, 1986	304	1986
Size-effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature-size S Bühlmann, B Dwir, J Baborowski, P Muralt Integrated Ferroelectrics 50 (1), 261-267, 2002	293	2002
A micro-solid oxide fuel cell system as battery replacement A Bieberle-Hütter, D Beckel, A Infortuna, UP Muecke, JLM Rupp, ... Journal of Power Sources 177 (1), 123-130, 2008	266	2008
Fabrication and characterization of PZT thin-film vibrators for micromotors P Muralt, M Kohli, T Maeder, A Kholkin, K Brooks, N Setter, R Luthier Sensors and Actuators A: Physical 48 (2), 157-165, 1995	254	1995
Piezoelectric aluminum nitride thin films for microelectromechanical systems G Piazza, V Felmetsger, P Muralt, RH Olsson III, R Ruby MRS bulletin 37 (11), 1051-1061, 2012	248	2012
Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions P Muralt, A Kholkin, M Kohli, T Maeder Sensors and Actuators A: Physical 53 (1-3), 398-404, 1996	246	1996
Piezoelectric thin films for MEMS P Muralt Integrated Ferroelectrics 17 (1-4), 297-307, 1997	236	1997

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