フォロー
Paul Muralt
Paul Muralt
Professor in Materials Science, EPFL, Lausanne, Switzerland
確認したメール アドレス: epfl.ch - ホームページ
タイトル
引用先
引用先
Thin film piezoelectrics for MEMS
S Trolier-McKinstry, P Muralt
Journal of Electroceramics 12, 7-17, 2004
12362004
Ferroelectric thin films for micro-sensors and actuators: a review
P Muralt
Journal of micromechanics and microengineering 10 (2), 136, 2000
10972000
Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications
MA Dubois, P Muralt
Applied Physics Letters 74 (20), 3032-3034, 1999
5681999
PZT thin films for microsensors and actuators: Where do we stand?
P Muralt
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 47 …, 2000
4492000
{1 0 0}-Textured, piezoelectric Pb (Zrx, Ti1− x) O3 thin films for MEMS: integration, deposition and properties
N Ledermann, P Muralt, J Baborowski, S Gentil, K Mukati, M Cantoni, ...
Sensors and Actuators A: Physical 105 (2), 162-170, 2003
4362003
Recent progress in materials issues for piezoelectric MEMS
P Muralt
Journal of the American Ceramic Society 91 (5), 1385-1396, 2008
4042008
Micromachined infrared detectors based on pyroelectric thin films
P Muralt
Reports on progress in physics 64 (10), 1339, 2001
3982001
Piezoelectric thin films for sensors, actuators, and energy harvesting
P Muralt, RG Polcawich, S Trolier-McKinstry
MRS bulletin 34 (9), 658-664, 2009
3732009
Piezoelectric micromachined ultrasonic transducers based on PZT thin films
P Muralt, N Ledermann, J Paborowski, A Barzegar, S Gentil, B Belgacem, ...
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 52 …, 2005
3682005
Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering
MA Dubois, P Muralt
Journal of Applied Physics 89 (11), 6389-6395, 2001
3662001
Thickness dependence of the properties of highly c-axis textured AlN thin films
F Martin, P Muralt, MA Dubois, A Pezous
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (2 …, 2004
3602004
Measurement of the effective transverse piezoelectric coefficient e31, f of AlN and Pb (Zrx, Ti1− x) O3 thin films
MA Dubois, P Muralt
Sensors and Actuators A: Physical 77 (2), 106-112, 1999
3351999
Texture control of and thin films with seeding
P Muralt, T Maeder, L Sagalowicz, S Hiboux, S Scalese, D Naumovic, ...
Journal of Applied Physics 83 (7), 3835-3841, 1998
3271998
Scanning tunneling potentiometry
P Muralt, DW Pohl
Applied Physics Letters 48 (8), 514-516, 1986
3051986
Size-effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature-size
S Bühlmann, B Dwir, J Baborowski, P Muralt
Integrated Ferroelectrics 50 (1), 261-267, 2002
2892002
A micro-solid oxide fuel cell system as battery replacement
A Bieberle-Hütter, D Beckel, A Infortuna, UP Muecke, JLM Rupp, ...
Journal of Power Sources 177 (1), 123-130, 2008
2642008
Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions
P Muralt, A Kholkin, M Kohli, T Maeder
Sensors and Actuators A: Physical 53 (1-3), 398-404, 1996
2441996
Fabrication and characterization of PZT thin-film vibrators for micromotors
P Muralt, M Kohli, T Maeder, A Kholkin, K Brooks, N Setter, R Luthier
Sensors and Actuators A: Physical 48 (2), 157-165, 1995
2431995
Piezoelectric aluminum nitride thin films for microelectromechanical systems
G Piazza, V Felmetsger, P Muralt, RH Olsson III, R Ruby
MRS bulletin 37 (11), 1051-1061, 2012
2292012
Piezoelectric thin films for MEMS
P Muralt
Integrated Ferroelectrics 17 (1-4), 297-307, 1997
2291997
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論文 1–20