| A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage X Li, W Gao, H Muto, Y Shimizu, S Ito, S Dian Precision Engineering 37 (3), 771-781, 2013 | 182 | 2013 |
| Design and construction of the motion mechanism of an XY micro-stage for precision positioning Y Shimizu, Y Peng, J Kaneko, T Azuma, S Ito, W Gao, TF Lu Sensors and Actuators A: Physical 201, 395-406, 2013 | 69 | 2013 |
| A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings X Li, W Gao, Y Shimizu, S Ito CIRP Annals 63 (1), 461-464, 2014 | 62 | 2014 |
| An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor YL Chen, S Wang, Y Shimizu, S Ito, W Gao, BF Ju Precision Engineering 39, 134-142, 2015 | 56 | 2015 |
| Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions Y Shimizu, SL Tan, D Murata, T Maruyama, S Ito, YL Chen, W Gao Optics Express 24 (3), 2788-2805, 2016 | 51 | 2016 |
| Mode-locked laser autocollimator with an expanded measurement range YL Chen, Y Shimizu, Y Kudo, S Ito, W Gao Optics express 24 (14), 15554-15569, 2016 | 46 | 2016 |
| Fabrication of large-size SiC mirror with precision aspheric profile for artificial satellite Y Shimizu, S Goto, JC Lee, S Ito, W Gao, S Adachi, K Omiya, H Sato, ... Precision Engineering 37 (3), 640-649, 2013 | 45 | 2013 |
| Precision tool setting for fabrication of a microstructure array W Gao, YL Chen, KW Lee, YJ Noh, Y Shimizu, S Ito CIRP annals 62 (1), 523-526, 2013 | 43 | 2013 |
| Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo YL Chen, Y Cai, K Tohyama, Y Shimizu, S Ito, W Gao Precision Engineering 49, 253-261, 2017 | 42 | 2017 |
| On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact YL Chen, Y Cai, Y Shimizu, S Ito, W Gao, BF Ju Precision Engineering 43, 462-467, 2016 | 34 | 2016 |
| Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool YL Chen, Y Cai, Y Shimizu, S Ito, W Gao, BF Ju Journal of Micromechanics and Microengineering 26 (2), 025002, 2015 | 34 | 2015 |
| An optical lever by using a mode-locked laser for angle measurement Y Shimizu, Y Kudo, YL Chen, S Ito, W Gao Precision Engineering 47, 72-80, 2017 | 33 | 2017 |
| Pitch deviation measurement of an involute spur gear by a rotary profiling system B Xu, Y Shimizu, S Ito, W Gao Precision Engineering 39, 152-160, 2015 | 30 | 2015 |
| Measurement of six-degree-of-freedom planar motions by using a multiprobe surface encoder X Li, Y Shimizu, T Ito, Y Cai, S Ito, W Gao Optical Engineering 53 (12), 122405-122405, 2014 | 30 | 2014 |
| Local electrophoresis deposition of nanomaterials assisted by a laser trapping technique F Iwata, M Kaji, A Suzuki, S Ito, H Nakao Nanotechnology 20 (23), 235303, 2009 | 30 | 2009 |
| Fabrication of scale gratings for surface encoders by using laser interference lithography with 405 nm laser diodes X Li, Y Shimizu, S Ito, W Gao International Journal of Precision Engineering and Manufacturing 14, 1979-1988, 2013 | 29 | 2013 |
| An edge reversal method for precision measurement of cutting edge radius of single point diamond tools YL Chen, Y Cai, M Xu, Y Shimizu, S Ito, W Gao Precision Engineering 50, 380-387, 2017 | 27 | 2017 |
| A Cr-N thin film displacement sensor for precision positioning of a micro-stage Y Peng, S Ito, Y Shimizu, T Azuma, W Gao, E Niwa Sensors and Actuators A: Physical 211, 89-97, 2014 | 26 | 2014 |
| Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer Y Shimizu, R Aihara, Z Ren, YL Chen, S Ito, W Gao Optics Express 24 (24), 27521-27535, 2016 | 25 | 2016 |
| A noncontact scanning electrostatic force microscope for surface profile measurement W Gao, S Goto, K Hosobuchi, S Ito, Y Shimizu CIRP annals 61 (1), 471-474, 2012 | 25 | 2012 |
Wei GaoTohoku University, Precision Nanometrology Lab確認したメール アドレス: cc.mech.tohoku.ac.jp
