| Design, fabrication, and testing of a bistable electromagnetically actuated microvalve M Capanu, JG Boyd, PJ Hesketh Journal of Microelectromechanical Systems 9 (2), 181-189, 2000 | 182 | 2000 |
| Local oxidation of silicon planarization for polysilicon layers under thin film structures A Cervin-Lawry, M Capanu US Patent 7,981,759, 2011 | 23 | 2011 |
| Systems and methods for a thin film capacitor having a composite high-k thin film stack M Zelner, M Capanu, SC Nagy US Patent 8,154,850, 2012 | 14 | 2012 |
| Electrostrictive resonance suppression for tunable capacitors M Capanu, A Cervin-Lawry, M Zelner US Patent 8,693,162, 2014 | 13 | 2014 |
| Hermetic Passivation Layer Structure for Capacitors with Perovskite or Pyrochlore Phase Dielectrics M Zelner, PBC Woo, A Cervin-Lawry, SC Nagy, M Capanu US Patent App. 11/767,559, 2008 | 11 | 2008 |
| Low loss thin film capacitor and methods of manufacturing the same A Cervin-Lawry, M Capanu, I Koutsaroff, M Zelner, T Bernacki US Patent App. 11/396,447, 2006 | 10 | 2006 |
| DC-Switchable and tunable piezoelectricity in rf thin-film BST capacitors M Capanu, T Bernacki, M Zelner, P Woo, A Cervin-Lawry, C Divita 2008 38th European Microwave Conference, 123-126, 2008 | 7 | 2008 |
| Electrostrictive resonance suppression for tunable capacitors M Capanu, AVC Cervin, M Zelner US Patent 9,318,266, 2016 | 6 | 2016 |
| Electronic component with reactive barrier and hermetic passivation layer M Zelner, PBC Woo, M Capanu, SC Nagy, AVC Cervin US Patent 8,664,704, 2014 | 6 | 2014 |
| Electronic component with reactive barrier and hermetic passivation layer M Zelner, M Capanu, PBC Woo, SC Nagy US Patent 8,361,811, 2013 | 6 | 2013 |
| Electrostrictive resonance suppression for tunable capacitors M Capanu, A Cervin-Lawry, M Zelner US Patent 8,194,387, 2012 | 6 | 2012 |
| Dielectric properties of (Ba, Sr) TiO/sub 3/MOD films grown on various substrates IP Koutsaroff, P Woo, L McNeil, M Zelner, A Kassam, M Capanu, L Chmiel, ... Proceedings of the 13th IEEE International Symposium on Applications of …, 2002 | 6 | 2002 |
| Systems and methods for a thin film capacitor having a composite high-K thin film stack M Zelner, M Capanu, SC Nagy US Patent 8,867,189, 2014 | 4 | 2014 |
| Electronic component with reactive barrier and hermetic passivation layer M Zelner, M Capanu, PBC Woo, SC Nagy US Patent 8,822,235, 2014 | 2 | 2014 |
| Electronic component with reactive barrier and hermetic passivation layer M Zelner, M Capanu, PBC Woo, SC Nagy US Patent 8,822,235, 2014 | 2 | 2014 |
| Electrostrictive devices M Capanu, A Cervin-Lawry, T Bernacki US Patent App. 11/508,465, 2007 | 2 | 2007 |
| Electronic Component with Reactive Barrier and Hermetic Passivation Layer M Zelner, PBC Woo, M Capanu, SC Nagy US Patent App. 14/475,038, 2014 | 1 | 2014 |
| Reliability of BST thin film capacitors M Zelner, M Capanu, T Bernacki, A Cervin-Lawry, C Divita Paper Ref: S0310_P0565, 2009 | 1 | 2009 |
| An Effective Passivation Film Stack for Thin Film BST Capacitors M Zelner, S Nagy, A Cervin-Lawry, M Capanu, T Bernacki, C Divita Integrated Ferroelectrics 104 (1), 80-89, 2008 | 1 | 2008 |
| Temperature Dependence of Biaxial Modulus and Thermal Expansion Coefficient of Thin Films Using Wafer Curvature Method M Capanu, A Cervin-Lawry, A Patel, I Koutsaroff, P Woo, L Wu, J Oh, ... MRS Online Proceedings Library (OPL) 795, U11. 29, 2003 | 1 | 2003 |
