| Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook C Yugma, J Blue, S Dauzère-Pérès, A Obeid Journal of Scheduling 18, 195-205, 2015 | 77 | 2015 |
| Performance analysis of demand planning approaches for aggregating, forecasting and disaggregating interrelated demands A Chen, J Blue International Journal of Production Economics 128 (2), 586-602, 2010 | 55 | 2010 |
| Translation-invariant multiscale energy-based PCA for monitoring batch processes in semiconductor manufacturing TJ Rato, J Blue, J Pinaton, MS Reis IEEE Transactions on Automation Science and Engineering 14 (2), 894-904, 2016 | 54 | 2016 |
| Recipe-independent indicator for tool health diagnosis and predictive maintenance A Chen, J Blue IEEE Transactions on Semiconductor Manufacturing 22 (4), 522-535, 2009 | 44 | 2009 |
| Automatic equipment fault fingerprint extraction for the fault diagnostic on the batch process data H Rostami, J Blue, C Yugma Applied Soft Computing 68, 972-989, 2018 | 40 | 2018 |
| Demand planning approaches to aggregating and forecasting interrelated demands for safety stock and backup capacity planning A Chen, CH Hsu, J Blue International journal of production Research 45 (10), 2269-2294, 2007 | 37 | 2007 |
| Impact of integrating equipment health in production scheduling for semiconductor fabrication YT Kao, S Dauzère-Pérès, J Blue, SC Chang Computers & Industrial Engineering 120, 450-459, 2018 | 26 | 2018 |
| Equipment condition diagnosis and fault fingerprint extraction in semiconductor manufacturing H Rostami, J Blue, C Yugma 2016 15th IEEE International Conference on Machine Learning and Applications …, 2016 | 24 | 2016 |
| A structure data-driven framework for virtual metrology modeling WT Yang, J Blue, A Roussy, J Pinaton, MS Reis IEEE Transactions on Automation Science and Engineering 17 (3), 1297-1306, 2019 | 21 | 2019 |
| Tool Condition Diagnosis with a Recipe-Independent Hierarchical Monitoring Scheme J Blue, D Gleispach, A Roussy, P Scheibelhofer IEEE Transactions on Semiconductor Manufacturing 26 (1), 82-91, 2013 | 20 | 2013 |
| Chamber-to-chamber discrepancy detection in semiconductor manufacturing A Chouichi, J Blue, C Yugma, F Pasqualini IEEE Transactions on Semiconductor Manufacturing 33 (1), 86-95, 2020 | 14 | 2020 |
| Spatial variance spectrum analysis and its application to unsupervised detection of systematic wafer spatial variations J Blue, A Chen IEEE transactions on automation science and engineering 8 (1), 56-66, 2010 | 14 | 2010 |
| A physics-informed Run-to-Run control framework for semiconductor manufacturing WT Yang, J Blue, A Roussy, J Pinaton, MS Reis Expert Systems with Applications 155, 113424, 2020 | 12 | 2020 |
| Efficient FDC based on hierarchical tool condition monitoring scheme J Blue, A Roussy, A Thieullen, J Pinaton 2012 SEMI Advanced Semiconductor Manufacturing Conference, 359-364, 2012 | 11 | 2012 |
| Opportunity for improving fab effectiveness by predictive overall equipment effectiveness (POEE) Y Kao, S Chang, S Dauzere-Peres, J Blue 2016 e-Manufacturing and Design Collaboration Symposium (eMDC), 1-4, 2016 | 10 | 2016 |
| Equipment deterioration modeling and cause diagnosis in semiconductor manufacturing H Rostami, J Blue, A Chen, C Yugma International Journal of Intelligent Systems 36 (6), 2618-2638, 2021 | 6 | 2021 |
| Virtual metrology modeling based on gaussian bayesian network WT Yang, J Blue, A Roussy, MS Reis, J Pinaton 2018 Winter Simulation Conference (WSC), 3574-3582, 2018 | 5 | 2018 |
| Optimum sampling for track PEB CD integrated metrology A Chen, S Hsueh, J Blue 2009 IEEE International Conference on Automation Science and Engineering …, 2009 | 5 | 2009 |
| Recipe-independent health indicator for tool predictive maintenance and fault diagnosis A Chen, J Blue IEEE Transactions on Semiconductor Manufacturing 22 (4), 522-535, 2009 | 5 | 2009 |
| Heterogranular multivariate analytics for detecting and controlling the root causes of the mismatching machines in semiconductor manufacturing A Chouichi, J Blue, C Yugma, F Pasqualini 2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC …, 2018 | 4 | 2018 |
