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Wolfgang Benecke
Wolfgang Benecke
Professor, Fraunhofer ISIT
Verified email at isit.fraunhofer.de
Title
Cited by
Cited by
Year
Direct growth of freestanding ZnO tetrapod networks for multifunctional applications in photocatalysis, UV photodetection, and gas sensing
YK Mishra, G Modi, V Cretu, V Postica, O Lupan, T Reimer, I Paulowicz, ...
ACS applied materials & interfaces 7 (26), 14303-14316, 2015
4622015
Thermally excited silicon microactuators
W Riethmuller, W Benecke
IEEE Transactions on Electron Devices 35 (6), 758-763, 1988
4371988
Process for manipulating microscopic, dielectric particles and a device therefor
W Benecke, B Wagner, G Fuhr, R Hagedorn, T Muller
US Patent 6,149,789, 2000
2102000
Method of continuously separating mixtures of microscopic dielectric particles and apparatus for carrying through this method
W Benecke, B Wagner, R Hagedorn, G Fuhr, T Muller
US Patent 5,454,472, 1995
1911995
Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivity
G Fuhr, R Hagedorn, T Muller, W Benecke, B Wagner
Journal of microelectromechanical systems 1 (3), 141-146, 1992
1911992
A novel surface-micromachined capacitive porous silicon humidity sensor
ZM Rittersma, A Splinter, A Bödecker, W Benecke
Sensors and Actuators B: Chemical 68 (1-3), 210-217, 2000
1892000
TMAHW etchants for silicon micromachining
U Schnakenberg, W Benecke, P Lange
TRANSDUCERS'91: 1991 International Conference on Solid-State Sensors and …, 1991
1881991
Levitation, holding, and rotation of cells within traps made by high-frequency fields
G Fuhr, WM Arnold, R Hagedorn, T Müller, W Benecke, B Wagner, ...
Biochimica et Biophysica Acta (BBA)-Biomembranes 1108 (2), 215-223, 1992
1761992
Microfabricated actuator with moving permanent magnet
B Wagner, W Benecke
[1991] Proceedings. IEEE Micro Electro Mechanical Systems, 27-32, 1991
1761991
Single step integration of ZnO nano-and microneedles in Si trenches by novel flame transport approach: whispering gallery modes and photocatalytic properties
T Reimer, I Paulowicz, R Roder, S Kaps, O Lupan, S Chemnitz, ...
ACS applied materials & interfaces 6 (10), 7806-7815, 2014
1612014
NH4OH-based etchants for silicon micromachining
U Schnakenberg, W Benecke, D Löchel
Sensors and Actuators A: Physical 23 (1-3), 1031-1035, 1990
1431990
A high-temperature thermopile fabrication process for thermal flow sensors
R Buchner, C Sosna, M Maiwald, W Benecke, W Lang
Sensors and Actuators A: Physical 130, 262-266, 2006
1292006
Permanent magnet micromotors on silicon substrates
B Wagner, M Kreutzer, W Benecke
Journal of Microelectromechanical Systems 2 (1), 23-29, 1993
1191993
Vapor-phase self-assembled monolayers for anti-stiction applications in MEMS
YX Zhuang, O Hansen, T Knieling, C Wang, P Rombach, W Lang, ...
Journal of Microelectromechanical Systems 16 (6), 1451-1460, 2007
992007
Thermal stability of vapor phase deposited self-assembled monolayers for MEMS anti-stiction
YX Zhuang, O Hansen, T Knieling, C Wang, P Rombach, W Lang, ...
Journal of Micromechanics and Microengineering 16 (11), 2259, 2006
982006
Linear motion of dielectric particles and living cells in microfabricated structures induced by traveling electric fields
G Fuhr, R Hagedorn, T Muller, B Wagner, W Benecke
[1991] Proceedings. IEEE Micro Electro Mechanical Systems, 259-264, 1991
961991
Applications of silicon microactuators based on bimorph structures
W Benecke, W Riethmuller
IEEE Micro Electro Mechanical Systems,, Proceedings,'An Investigation of …, 1989
881989
Pumping of water solutions in microfabricated electrohydrodynamic systems
G Fuhr, R Hagedorn, T Muller, W Benecke, B Wagner
[1992] Proceedings IEEE Micro Electro Mechanical Systems, 25-30, 1992
871992
NH4OH-based etchants for silicon micromachining: influence of additives and stability of passivation layers
U Schnakenberg, W Benecke, B Löchel, S Ullerich, P Lange
Sensors and Actuators A: Physical 25 (1-3), 1-7, 1990
841990
A smart accelerometer with on-chip electronics fabricated by a commercial CMOS process
W Riethmüller, W Benecke, U Schnakenberg, B Wagner
Sensors and Actuators A: Physical 31 (1-3), 121-124, 1992
801992
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