Shinya Yoshida
Shinya Yoshida
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LSI-based amperometric sensor for bio-imaging and multi-point biosensing
KY Inoue, M Matsudaira, R Kubo, M Nakano, S Yoshida, S Matsuzaki, ...
Lab on a Chip 12 (18), 3481-3490, 2012
Advanced LSI-based amperometric sensor array with light-shielding structure for effective removal of photocurrent and mode selectable function for individual operation of 400 …
KY Inoue, M Matsudaira, M Nakano, K Ino, C Sakamoto, Y Kanno, R Kubo, ...
Lab on a Chip 15 (3), 848-856, 2015
Densified electrochemical sensors based on local redox cycling between vertically separated electrodes in substrate generation/chip collection and extended feedback modes
K Ino, Y Kanno, T Nishijo, H Komaki, Y Yamada, S Yoshida, Y Takahashi, ...
Analytical chemistry 86 (8), 4016-4023, 2014
Electrical modification of a conductive polymer using a scanning probe microscope
T Ono, S Yoshida, M Esashi
Nanotechnology 14 (9), 1051, 2003
Highly c-axis-oriented monocrystalline Pb(Zr, Ti)O3 thin films on si wafer prepared by fast cooling immediately after sputter deposition
S Yoshida, H Hanzawa, K Wasa, M Esashi, S Tanaka
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 61 …, 2014
Fabrication and characterization of large figure-of-merit epitaxial PMnN-PZT/Si transducer for piezoelectric MEMS sensors
S Yoshida, H Hanzawa, K Wasa, S Tanaka
Sensors and Actuators A: Physical 239, 201-208, 2016
Deposition of conductivity-switching polyimide film by molecular layer deposition and electrical modification using scanning probe microscope
S Yoshida, T Ono, M Esashi
Micro & Nano Letters 5 (5), 321-323, 2010
Reversible electrical modification on conductive polymer for proximity probe data storage
S Yoshida, T Ono, S Oi, M Esashi
Nanotechnology 16 (11), 2516, 2005
Epitaxial PMnN-PZT/Si MEMS ultrasonic rangefinder with 2 m range at 1 V drive
Z Zhou, S Yoshida, S Tanaka
Sensors and Actuators A: Physical 266, 352-360, 2017
Local electrical modification of a conductivity-switching polyimide film formed by molecular layer deposition
S Yoshida, T Ono, M Esashi
Nanotechnology 22 (33), 335302, 2011
Redox active polymers with phenothiazine moieties for nanoscale patterning via conductive scanning force microscopy
AA Golriz, T Kaule, J Heller, MB Untch, P Schattling, P Theato, M Toda, ...
Nanoscale 3 (12), 5049-5058, 2011
Conductive polymer patterned media fabricated by diblock copolymer lithography for scanning multiprobe data storage
S Yoshida, T Ono, M Esashi
Nanotechnology 19 (47), 475302, 2008
Integration of boron-doped diamond microelectrode on CMOS-based amperometric sensor array by film transfer technology
T Hayasaka, S Yoshida, KY Inoue, M Nakano, T Matsue, M Esashi, ...
Journal of Microelectromechanical Systems 24 (4), 958-967, 2014
Fabrication and characterization of laterally-driven piezoelectric bimorph MEMS actuator with sol–gel-based high-aspect-ratio PZT structure
S Yoshida, N Wang, M Kumano, Y Kawai, S Tanaka, M Esashi
Journal of Micromechanics and Microengineering 23 (6), 065014, 2013
Development of ballistic hot electron emitter and its applications to parallel processing: active-matrix massive direct-write lithography in vacuum and thin-film deposition in …
N Koshida, A Kojima, N Ikegami, R Suda, M Yagi, J Shirakashi, ...
Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (3), 031215, 2015
Measurement of muonium emission from silica aerogel
P Bakule, GA Beer, D Contreras, M Esashi, Y Fujiwara, Y Fukao, S Hirota, ...
Progress of Theoretical and Experimental Physics 2013 (10), 2013
An investigation of the mechanical strengthening effect of hydrogen anneal for silicon torsion bar
R Hajika, S Yoshida, Y Kanamori, M Esashi, S Tanaka
Journal of Micromechanics and Microengineering 24 (10), 105014, 2014
Conductive polymer patterned media for scanning multiprobe data storage
S Yoshida, T Ono, M Esashi
Nanotechnology 18 (50), 505302, 2007
Simple removal technology of chemically stable polymer in MEMS using ozone solution
S Yoshida, H Yanagida, M Esashi, S Tanaka
Journal of microelectromechanical systems 22 (1), 87-93, 2012
Monocrystalline PMNN-PZT thin film ultrasonic rangefinder with 2 meter range at 1 volt drive
Z Zhou, S Yoshida, S Tanaka
2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017
論文 1–20