Reinoud Wolffenbuttel
Reinoud Wolffenbuttel
確認したメール アドレス: tudelft.nl
タイトル
引用先
引用先
Surface micromachined tuneable interferometer array
K Aratani, PJ French, PM Sarro, D Poenar, RF Wolffenbuttel, ...
Sensors and Actuators A: Physical 43 (1-3), 17-23, 1994
2971994
Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature
RF Wolffenbuttel, KD Wise
Sensors and Actuators A: Physical 43 (1-3), 223-229, 1994
2391994
Low-temperature intermediate Au-Si wafer bonding; eutectic or silicide bond
RF Wolffenbuttel
Sensors and Actuators A: Physical 62 (1-3), 680-686, 1997
2191997
State-of-the-art in integrated optical microspectrometers
RF Wolffenbuttel
IEEE Transactions on Instrumentation and Measurement 53 (1), 197-202, 2004
1982004
Optimization of a low-stress silicon nitride process for surface-micromachining applications
PJ French, PM Sarro, R Mallée, EJM Fakkeldij, RF Wolffenbuttel
Sensors and Actuators A: physical 58 (2), 149-157, 1997
1961997
MEMS-based optical mini-and microspectrometers for the visible and infrared spectral range
RF Wolffenbuttel
Journal of Micromechanics and Microengineering 15 (7), S145, 2005
1902005
Comparison of techniques for measuring both compressive and tensile stress in thin films
BP Van Drieënhuizen, JFL Goosen, PJ French, RF Wolffenbuttel
Sensors and Actuators A: Physical 37, 756-765, 1993
1641993
Modeling the mechanical behavior of bulk-micromachined silicon accelerometers
RP van Kampen, RF Wolffenbuttel
Sensors and Actuators A: Physical 64 (2), 137-150, 1998
1591998
Infrared micro-spectrometer based on a diffraction grating
SH Kong, DDL Wijngaards, RF Wolffenbuttel
Sensors and Actuators A: Physical 92 (1-3), 88-95, 2001
1112001
Silicon sensors and circuits: on-chip compatibility
RF Wolffenbuttel
Springer Science & Business Media, 1996
951996
Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer
RP Van Kampen, MJ Vellekoop, PM Sarro, RF Wolffenbuttel
Sensors and Actuators A: Physical 43 (1-3), 100-106, 1994
931994
Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter
A Emadi, H Wu, G de Graaf, R Wolffenbuttel
Optics Express 20 (1), 489-507, 2012
872012
Process and design considerations for surface micromachined beams for a tuneable interferometer array in silicon
K Aratani, PJ French, PM Sarro, RF Wolffenbuttel, S Middelhoek
[1993] Proceedings IEEE Micro Electro Mechanical Systems, 230-235, 1993
851993
Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices
DDL Wijngaards, SH Kong, M Bartek, RF Wolffenbuttel
Sensors and Actuators A: Physical 85 (1-3), 316-323, 2000
802000
Bulk-micromachined tunable Fabry–Perot microinterferometer for the visible spectral range
JH Correia, M Bartek, RF Wolffenbuttel
Sensors and Actuators A: Physical 76 (1-3), 191-196, 1999
801999
The development of a low-stress polysilicon process compatible with standard device processing
PJ French, BP Van Drieenhuizen, D Poenar, JFL Goosen, R Mallee, ...
Journal of microelectromechanical systems 5 (3), 187-196, 1996
781996
Analysis and analytical modeling of static pull-in with application to MEMS-based voltage reference and process monitoring
LA Rocha, E Cretu, RF Wolffenbuttel
Journal of microelectromechanical systems 13 (2), 342-354, 2004
772004
Vacuum sealing of microcavities using metal evaporation
M Bartek, JA Foerster, RF Wolffenbuttel
Sensors and Actuators A: Physical 61 (1-3), 364-368, 1997
751997
Micromachined variable capacitors with wide tuning range
Z Xiao, W Peng, RF Wolffenbuttel, KR Farmer
Sensors and Actuators A: Physical 104 (3), 299-305, 2003
742003
Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning
LA Rocha, E Cretu, RF Wolffenbuttel
Journal of Microelectromechanical Systems 15 (1), 69-83, 2006
722006
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