Effects of abnormal beams on writing qualities in massively-parallel e-beam systems MN Hasan, SY Lee, BS Ahn, J Choi, SB Kim, CU Jeon Journal of Vacuum Science & Technology B, Nanotechnology and …, 2019 | 6 | 2019 |
Reduction of exposing time in massively-parallel E-beam systems MN Hasan, SY Lee, BS Ahn, J Choi, JS Park Journal of Vacuum Science & Technology B, Nanotechnology and …, 2022 | 3 | 2022 |
Shape and dose control for proximity effect correction on massively parallel electron-beam systems MN Hasan, SY Lee, BS Ahn, J Choi, JS Park Journal of Vacuum Science & Technology B, Nanotechnology and …, 2020 | 3 | 2020 |
Demand management using utility based real time pricing for smart grid with a new cost function KT Ahmed, MN Hasan, MF Hossain, KS Munasinghe, A Jamalipour 2017 27th International Telecommunication Networks and Applications …, 2017 | 3 | 2017 |
Effectiveness of multipass and multirow writing methods for massively parallel e-beam systems MN Hasan, SY Lee, BS Ahn, J Choi, JS Park Journal of Vacuum Science & Technology B, Nanotechnology and …, 2020 | 2 | 2020 |
Generalized performance optimization for massively-parallel electron-beam systems SY Lee, MN Hasan Journal of Vacuum Science & Technology B 41 (4), 2023 | | 2023 |
Analysis and Optimization of Lithographic Performance on Massively-Parallel Electron-beam Systems MN Hasan | | 2023 |