フォロー
Kevin Hin Leung Chau
Kevin Hin Leung Chau
Hong Kong University of Science and Technology, Department of Electronic and Computer Engineering
確認したメール アドレス: ust.hk - ホームページ
タイトル
引用先
引用先
Scaling limits in batch-fabricated silicon pressure sensors
HL Chau, KD Wise
IEEE Transactions on Electron Devices 34 (4), 850-858, 1987
373*1987
An integrated force-balanced capacitive accelerometer for low-g applications
KHL Chau, SR Lewis, Y Zhao, RT Howe, SF Bart, RG Marcheselli
Sensors and Actuators A: Physical 54 (1-3), 472-476, 1996
3321996
Scaling limits in batch-fabricated silicon pressure sensors
HL Chau, KD Wise
1985 International conference on solid-state sensors and actuators …, 1985
2351985
An ultraminiature solid-state pressure sensor for a cardiovascular catheter
HL Chau, KD Wise
IEEE transactions on Electron Devices 35 (12), 2355-2362, 1988
2211988
Ultraminiature pressure sensor with addressable read-out circuit
KD Wise, HL Chau
US Patent 5,113,868, 1992
1951992
Multipoint pressure-sensing catheter system
KD Wise, HL Chau
US Patent 4,815,472, 1989
1881989
Ultraminiature pressure sensor and method of making same
KD Wise, HL Chau
US Patent 4,881,410, 1989
1191989
Ultraminiature single-crystal sensor with movable member
KD Wise, HL Chau
US Patent 5,207,103, 1993
1131993
A low cost monolithic accelerometer; product/technology update
Tsang, Core, Payne, Quinn, Chau, Farash, Baum
1992 International Technical Digest on Electron Devices Meeting, 501-504, 1992
901992
Method of making an ultraminiature pressure sensor
KD Wise, HL Chau
US Patent 5,013,396, 1991
831991
Technology for the high-volume manufacturing of integrated surface-micromachined accelerometer products
KHL Chau, RE Sulouff Jr
Microelectronics Journal 29 (9), 579-586, 1998
701998
Method for fabricating microstructures using temporary bridges
KHL Chau, MP Saltmarsh, DA Church
US Patent 5,364,497, 1994
601994
Conductive plane beneath suspended microstructure
KHL Chau, RT Howe, RS Payne, Y Zhao, TA Core, SJ Sherman
US Patent 5,858,809, 1999
521999
Noise due to Brownian motion in ultrasensitive solid-state pressure sensors
HL Chau, KD Wise
IEEE transactions on electron devices 34 (4), 859-865, 1987
451987
Overpressure-protected, differential pressure sensor and method of making the same
CD Fung, KHL Chau, PR Harris, JG Panagou, GA Dahrooge
US Patent 5,220,838, 1993
421993
Conductive plane beneath suspended microstructure
KHL Chau, RT Howe, RS Payne, Y Zhao, TA Core, SJ Sherman
US Patent 5,640,039, 1997
411997
Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
CD Fung, KHL Chau
US Patent 5,344,523, 1994
331994
Removing sacrificial material through temporary channels as a method of making an overpressure-protected differential pressure sensor
CD Fung, KHL Chau, PR Harris, JG Panagou, GA Dahrooge
US Patent 5,438,875, 1995
251995
Stress mitigation in packaged microchips
X Zhang, M Judy, KHL Chau, N Kuan, T Spooner, C Paydenkar, P Farrell
US Patent 8,344,487, 2013
242013
Method for calibrating accelerometer sensitivity
KHL Chau, HR Samuels
US Patent 7,093,478, 2006
242006
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