フォロー
Yuan-Liu Chen
Yuan-Liu Chen
確認したメール アドレス: nano.mech.tohoku.ac.jp
タイトル
引用先
引用先
Measurement technologies for precision positioning
W Gao, SW Kim, H Bosse, H Haitjema, YL Chen, XD Lu, W Knapp, ...
CIRP annals 64 (2), 773-796, 2015
5162015
The art of electrochemical etching for preparing tungsten probes with controllable tip profile and characteristic parameters
BF Ju, YL Chen, Y Ge
Review of Scientific Instruments 82 (1), 2011
1372011
Optical frequency domain angle measurement in a femtosecond laser autocollimator
YL Chen, Y Shimizu, J Tamada, Y Kudo, S Madokoro, K Nakamura, ...
Optics Express 25 (14), 16725-16738, 2017
622017
An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor
YL Chen, S Wang, Y Shimizu, S Ito, W Gao, BF Ju
Precision Engineering 39, 134-142, 2015
562015
Systematic study of electropolishing technique for improving the quality and production reproducibility of tungsten STM probe
BF Ju, YL Chen, M Fu, Y Chen, Y Yang
Sensors and Actuators A: Physical 155 (1), 136-144, 2009
522009
Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions
Y Shimizu, SL Tan, D Murata, T Maruyama, S Ito, YL Chen, W Gao
Optics Express 24 (3), 2788-2805, 2016
512016
Mode-locked laser autocollimator with an expanded measurement range
YL Chen, Y Shimizu, Y Kudo, S Ito, W Gao
Optics express 24 (14), 15554-15569, 2016
462016
Precision tool setting for fabrication of a microstructure array
W Gao, YL Chen, KW Lee, YJ Noh, Y Shimizu, S Ito
CIRP annals 62 (1), 523-526, 2013
432013
Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo
YL Chen, Y Cai, K Tohyama, Y Shimizu, S Ito, W Gao
Precision Engineering 49, 253-261, 2017
422017
Laser autocollimation based on an optical frequency comb for absolute angular position measurement
YL Chen, Y Shimizu, J Tamada, K Nakamura, H Matsukuma, X Chen, ...
Precision Engineering 54, 284-293, 2018
362018
On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact
YL Chen, Y Cai, Y Shimizu, S Ito, W Gao, BF Ju
Precision Engineering 43, 462-467, 2016
342016
Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool
YL Chen, Y Cai, Y Shimizu, S Ito, W Gao, BF Ju
Journal of Micromechanics and Microengineering 26 (2), 025002, 2015
342015
An optical lever by using a mode-locked laser for angle measurement
Y Shimizu, Y Kudo, YL Chen, S Ito, W Gao
Precision Engineering 47, 72-80, 2017
332017
A chromatic confocal probe with a mode-locked femtosecond laser source
X Chen, T Nakamura, Y Shimizu, C Chen, YL Chen, H Matsukuma, ...
Optics & Laser Technology 103, 359-366, 2018
302018
An edge reversal method for precision measurement of cutting edge radius of single point diamond tools
YL Chen, Y Cai, M Xu, Y Shimizu, S Ito, W Gao
Precision Engineering 50, 380-387, 2017
272017
Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer
Y Shimizu, R Aihara, Z Ren, YL Chen, S Ito, W Gao
Optics Express 24 (24), 27521-27535, 2016
252016
Rapid measurement of a high step microstructure with 90 steep sidewall
BF Ju, YL Chen, W Zhang, FZ Fang
Review of Scientific Instruments 83 (1), 2012
252012
Design and testing of a compact non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of large-area two-dimensional scale gratings
Y Shimizu, R Aihara, K Mano, C Chen, YL Chen, X Chen, W Gao
Precision Engineering 52, 138-151, 2018
242018
A stitching linear-scan method for roundness measurement of small cylinders
YL Chen, Y Machida, Y Shimizu, H Matsukuma, W Gao
CIRP annals 67 (1), 535-538, 2018
222018
A measurement method of cutting tool position for relay fabrication of microstructured surface
YL Chen, W Gao, BF Ju, Y Shimizu, S Ito
Measurement Science and Technology 25 (6), 064018, 2014
222014
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論文 1–20