Hiroyuki Miyazoe
Hiroyuki Miyazoe
IBM T.J. Watson Research Center
確認したメール アドレス: us.ibm.com - ホームページ
Carbon nanotube complementary wrap-gate transistors
AD Franklin, SO Koswatta, DB Farmer, JT Smith, L Gignac, CM Breslin, ...
Nano letters 13 (6), 2490-2495, 2013
Selective sputtering for pattern transfer
M Hoinkis, H Miyazoe, E Joseph
US Patent 9,493,879, 2016
Two-Dimensional Pattern Formation Using Graphoepitaxy of PS-b-PMMA Block Copolymers for Advanced FinFET Device and Circuit Fabrication
H Tsai, JW Pitera, H Miyazoe, S Bangsaruntip, SU Engelmann, CC Liu, ...
ACS nano 8 (5), 5227-5232, 2014
Copper residue chamber clean
M Hoinkis, C Yan, H Miyazoe, E Joseph
US Patent 9,114,438, 2015
Effect of annealing on the mobility and morphology of thermally activated pentacene thin film transistors
D Guo, S Ikeda, K Saiki, H Miyazoe, K Terashima
Journal of applied physics 99 (9), 094502, 2006
Sub-30 nm pitch line-space patterning of semiconductor and dielectric materials using directed self-assembly
HY Tsai, H Miyazoe, S Engelmann, B To, E Sikorski, J Bucchignano, ...
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2012
Tone inversion of self-assembled self-aligned structures
MA Guillorn, SJ Holmes, C Liu, H Miyazoe, H Tsai
US Patent 8,771,929, 2014
Graphoepitaxy of sexithiophene on thermally oxidized silicon surface with artificial periodic grooves
S Ikeda, K Saiki, K Tsutsui, T Edura, Y Wada, H Miyazoe, K Terashima, ...
Applied physics letters 88 (25), 251905, 2006
Pulsed laser ablation synthesis of diamond molecules in supercritical fluids
S Nakahara, S Stauss, H Miyazoe, T Shizuno, M Suzuki, H Kataoka, ...
Applied Physics Express 3 (9), 096201, 2010
Systematic studies on reactive ion etch-induced deformations of organic underlayers
M Glodde, S Engelmann, M Guillorn, S Kanakasabapathy, E Mclellan, ...
Advances in Resist Materials and Processing Technology XXVIII 7972, 797216, 2011
Pathway to the piezoelectronic transduction logic device
PM Solomon, BA Bryce, MA Kuroda, R Keech, S Shetty, TM Shaw, ...
Nano letters 15 (4), 2391-2395, 2015
The influence of process parameters on precursor evaporation for alumina nanopowder synthesis in an inductively coupled rf thermal plasma
JW Shin, H Miyazoe, M Leparoux, S Siegmann, JL Dorier, C Hollenstein
Plasma Sources Science and Technology 15 (3), 441, 2006
Scalable and fully self-aligned n-type carbon nanotube transistors with gate-all-around
AD Franklin, SO Koswatta, D Farmer, GS Tulevski, JT Smith, H Miyazoe, ...
2012 International Electron Devices Meeting, 4.5. 1-4.5. 4, 2012
Synthesis of diamondoids by supercritical xenon discharge plasma
T Shizuno, H Miyazoe, K Saito, S Stauss, M Suzuki, T Sasaki, ...
Japanese Journal of Applied Physics 50 (3R), 030207, 2011
Controlled focused electron beam-induced etching for the fabrication of sub-beam-size nanoholes
H Miyazoe, I Utke, J Michler, K Terashima
Applied Physics Letters 92 (4), 043124, 2008
Development of a dielectric-barrier discharge enhanced microplasma jet
S Kiriu, H Miyazoe, F Takamine, M Sai, JH Choi, T Tomai, K Terashima
Applied Physics Letters 94 (19), 191502, 2009
Resistivity of copper interconnects beyond the 7 nm node
A Pyzyna, R Bruce, M Lofaro, H Tsai, C Witt, L Gignac, M Brink, M Guillorn, ...
2015 Symposium on VLSI Technology (VLSI Technology), T120-T121, 2015
Improving the metallic content of focused electron beam-induced deposits by a scanning electron microscope integrated hydrogen-argon microplasma generator
H Miyazoe, I Utke, H Kikuchi, S Kiriu, V Friedli, J Michler, K Terashima
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2010
Synthesis of the higher-order diamondoid hexamantane using low-temperature plasmas generated in supercritical xenon
S Stauss, H Miyazoe, T Shizuno, K Saito, T Sasaki, K Terashima
Japanese Journal of Applied Physics 49 (7R), 070213, 2010
Self-aligned pitch split for unidirectional metal wiring
JB Chang, MA Guillorn, EA Joseph, H Miyazoe
US Patent 9,786,597, 2017
論文 1–20